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黄光制程设备 Photo Process Equipments

时间:2015-11-25 11:27      发布人:廖燕菲      阅读:238

黄光制程设备

设备简介

该黄光区设备包括基片清洗机、匀胶机、热台、曝光机、显影机、洁净烘箱、HMDS烘箱等设备,用于完成基片清洗、烘干、基板增黏剂处理、光刻胶涂布、烤胶、曝光、显影等黄光工艺制程。

 

Photo Process Equipments including substrate cleaner, spin coater, hot plate, lithography machine, developer, clean-room oven, HMDS vapor prime oven,etc. The tools are used to accomplish photo process such as substrate cleaning, drying, HMDS treatment, photo-resist coating, baking, lithography, developing, etc.